Commercial metrology tools

Shack Hartman sensor

 

 

 

 

 

 

 

 

 

 

• Micro lens array: 116 x 116
• RMS Repeatability (without averaging): < 0.2 nm
• System Accuracy : < 0.6 nm 

Instanteneous phase shifting interferometer

 

 

 

 

 

 

 

 

 

 

 

 

 

Interferometer HS 2000 and Minotaur

• Detector resolution per frame (x,y): > 1024 x 768 px
• Coherence length > 100 m
• RMS Repeatability (without averaging): < 0.2 nm
• System Accuracy : < 0.6 nm

Fringe projection (ATOS)

 

 

 

 

 

 

 

 

 

 

ATOS

• Expected measurement accuracies are typically 100 ppm.
• For a measurement field of about 200 mm, a 0.02 mm uncertainty on the coordinates is estimated.
• The stitching process adds 0.01 mm.

Stereo correlation (ARAMIS)

Real time metrology control

• Digital Image Correlation

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Principle :

Two cameras looking to one object gives a stereoscopic vision

Laser traker (API)

• Angular Resolution: ± 0.018 arc seconds
• System Angular Accuracy: 3.5 μm/m*
• System Resolution: 0.02 arc seconds
• API Micro radian accuracy of the measurement is < 5 ppm or +/- 10 µm which ever is greater
• API Micro radian accuracy of the measurement is < 5 ppm or +/- 10 µm which ever is greater

Theodolites (LEICA)

 

Autocollimator

 

• Beam diameter (nominal)  :  8 mm 
• Maximum recommended working distance :  2000 mm
• Maximum calibrated measuring range (each axis) :  ±1200 arc-seconds (±0.33 degree)
• Output resolution :   0.01 arc-second

Relative distancemeter / velocimeter

 

Typical application of commercial metrology tools for cladding monitoring

• Beam diameter (nominal)  :  8 mm 
• Maximum recommended working distance :  2000 mm
• Maximum calibrated measuring range (each axis) :  ±1200 arc-seconds (±0.33 degree)
• Output resolution :   0.01 arc-second