Airlock

Airlock 1

Airlock 2

Cleanliness :

ambient air

(on request, can be adapted in class 100000)

class 10000

Dimensions

• lenght

9.21 m

9.28 m

• width

8.05 m (between beams) / 8.35 m

7.49 m (between air co tube & beam)/8.35 m

• height

9.42 m

9.42 m

Temperature regulation

not controlled

21 °C +/- 2 °C

Relative humidity :

not controlled

55 % +/- 5 %

Light level at floor level

350 lux

800 lux

Crane

• capacity

5 T

5 T

• clearance under the hook

6.89 m

6.68 m

• clearance under the hoist

7.47 m

7.47 m

Floor

Concrete (epoxy paint).

epoxy

Doors

►Ext : H:5.01m * L:4.97m

►SAS 2 : H:4.42 m *  L :4.9m.

(on request , could be increased to 4.90 m wide)

►F5 clean room : H :5.01m*L :4.97m

►F6.5 clean room H :4.48* L:4.48m