Surface Engineering : Major Equipments

Instruments of the Surface Micro & Nano Engineering Laboratory

  • Thin films deposition facilities:
    • Ion beam sputtering
    • Magnetron sputtering
    • Evaporation
  • Laser processes
    • Laser-induced forward transfer (LIFT)
    • Laser ablation
    • Laser generation of nanoparticles
  • Ion and Plasma processes
    • Ion beam figuring
    • Dry etching
  • Photolithography
    • Direct laser writing
    • Soft-UV lithography
    • UV contact lithography
  • Micro & nanostructures replication
    • Nickel electrolysis
    • Hot embossing station
    • Soft-UV embossing station
  • Characterization
    • Ellispsometers (coating thickness and refractive index over 280nm-25μm)
    • Spectrophotometers (reflectivity, absorption, solar absorptance and and transmission, 175nm-25μm)
    • Refractometer (refractive index of liquid)
    • Contact angle (surface wettability)
    • Four-point probe (electrical resistivity)
    • Flash thermoreflectance (thermal diffusivity of thin films and bulk materials)
    • Surface plasmon resonance (liquid analysis)
    • Scanning electron microscope (surface topology)
    • Optical profiler (surface topology)
    • Atomic force microscope (surface topology)

 

<- Back


Contact(s) : Karl Fleury kfleury@ulg.ac.be